Characteristics of MgO Layer Deposited under Hydrogen Atmosphere

  • Park, Kyung-Hyun (Department of Materials science and Engineering, Hongik University) ;
  • Kim, Yong-Seog (Department of Materials science and Engineering, Hongik University)
  • 발행 : 2006.06.24

초록

The characteristics of MgO layer deposited under hydrogen atmosphere were investigated. Hydrogen gas was introduced during e-beam evaporation coating process of MgO layer and its effects on microstructure, cathode luminescence spectra, discharge voltages and effective yield of secondary electron emission were examined. The results indicated that the hydrogen influences the concentration and energy levels of defects in MgO layer, which in turn affects the luminance efficiency and discharge delays of the panels significantly.

키워드

참고문헌

  1. Rak-hwan Kim, Younghyun Kim, and Jong-Wan Park, Thin Solid Films 376 (2000) pp. 183-187 https://doi.org/10.1016/S0040-6090(00)01184-6
  2. J.S. Oh, J.Y. Lim, H.S. Jeong., J.W. Cho, Kang and E.H. Choi, IDW '02 digest, pp.785-788 (2002)
  3. M. Ishimoto, S. Hikada, K. Betsui, and K. Shinoda, SID '99 Digest P-25. (1999)
  4. T. Okada and T. Komaki, SID Digest of Technical Papers, v. 36 no. 2, 2005, pp. 1245-1247
  5. R.I. Eglitis, and A.I. Popov, et all. 'Semi-empirical simulations of the electron centers in MgO crystal' Computational Materials Science 5 (1996) pp. 298-306 https://doi.org/10.1016/0927-0256(95)00046-1
  6. Y. Motoyama, Y. Hirano, K. Ishii, Y. Murakami, and F. Sato, J. of Appl. Phys., 95(12), pp. 8419-8424(2004) https://doi.org/10.1063/1.1751239
  7. Sean J. Yoon, Insook Lee, Jong-Wan Leel, and Byungdu Oh Jpn. J. Appl. Phys. Vol. 40 (2001) pp. 809-812 https://doi.org/10.1143/JJAP.40.809
  8. G. H. Rosenblatt, M. W. Rowe, G. P. Williams, R. T. Williams, and Y. Chen, Phys. Review, 39(14), pp. 10309-10318 (1989) https://doi.org/10.1103/PhysRevB.39.10309
  9. B. T. Jeffries, R. Gonzalez, Y. Chen, and G. P. Summers, 25(3) pp. 2077-2080 (1982)
  10. V. v. Elsbergen, P. K. Bachmann, and T. Juestel, SID Tech. Digest, pp. 220-223 (2000)
  11. M.-S. Lee, Y. Matulevich, J.-S. Choi, S.-K. Kim, J.-H. Kim, S.-S. Suh, D.-S. Zang, and K.-D. Kim, SID Tech. Digest, pp. 1232-1235(2005)
  12. M.Makino, E. Mizobata, and K. Toki, IDW '01 Digest PDP3-1, pp. 809-812 (2001)