한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제23권4호
  • /
  • Pages.168-175
  • /
  • 2006
  • /
  • 1225-9071(pISSN)
  • /
  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

원자간력 현미경의 측정면적 확대에 관한 연구

A Study on Measurement Range Extension for Atomic Force Microscope

  • 고명준 (금오공과대학교 대학원) ;
  • ;
  • 홍성욱 (금오공과대학교 기계공학부)
  • 발행 : 2006.04.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

This paper presents surface matching algorithms that can be used to reconstruct the surface topography of an object scanned by an AFM. The essence of the algorithms is to match up neighboring images intentionally overlapped with others. Two performance indexes using the correlation coefficient and the sum of the squared differences are introduced. To compensate for the inaccuracy of the coarse stage implemented to AFM, all the six axes including the rotational degrees of freedom are successively matched so as to maximize the coefficients defined. The results show that the proposed algorithms are useful for measurement range extension of AFM. The results also show that a combined use of the two indexes is beneficial for practical cases.

키워드

참고문헌

  1. Rabe, U., Kopcinska, M., Hirsekom, S. and Arnold, W., 'Evaluation of the contact resonance frequencies in atomic force microscopy as a method for surface characterization (invited),' Elsevier Science B. Ultrasonics, Vol. 40, pp. 49-54, 2002 https://doi.org/10.1016/S0041-624X(02)00089-6
  2. Park, J. K., Kwon, H. K. and Hong, S. W., 'Vibration characteristics and performance of cantilever for non-contact atomic force microscopy,' Trans. of the Korean Society for Noise and Vibration Engineering, Vol.l4, No.6, pp.495-502, 2004 https://doi.org/10.5050/KSNVN.2004.14.6.495
  3. Jung, H. W., Shim, J. Y. and Gweon, D. G., 'Analysis and control of contact mode AFM,' Journal of the Korean Society of Precision Engineering, Vol.15, No.13, pp. 99-106, 1998
  4. Hong, S.W., Ko, M. J., Shin, Y. H. and Lee, D. W., 'Development of a measurement system for the surface of micro-parts,' Proceedings of 2005 Spring Conference of Korean Society of Machine Tool Engineering, pp.413-418, 2005
  5. Lee, J. K. and Cho, J. H.,'A study on the allowable correlation coefficient determination for image matching in digital photogrammetry,' Journal of Korean Society of Geo-spatial Information System, Vol.5, No.2, pp.99-110, 1997
  6. Gonzalez, R. C. and Woods, R. E., 'Digital Image Processing,' Prentice Hall, 2002
  7. Neemuchwala, H., Hero, A. and Carson, P., 'Image matching using alpha-entropy measures and entropic graphs,' Signal Processing, Vol. 85, pp. 277-296, 2005 https://doi.org/10.1106/j.sigpro.2004.10.002
  8. Shinagawa, Y. and Kunli, T. L., 'Unconstrained automatic image matching using multi-resolutional critical-point filters,' IEEE Trans. PAMI, Vol. 20, No.9, pp.994-1010, 1998 https://doi.org/10.1109/34.713364
  9. Gonzalez, R. C., Woods, R. E. and Eddins, S. L., 'Digital Image Processing Using MATLAB,' Prentice Hall, 2004
  10. Tan, C. L., Ng, P.O., 'Text extraction using pyramid,' Pattern Recognition, Vol. 31, No.1, pp.63-72, 1998 https://doi.org/10.1016/S0031-3203(97)00026-5