Abstract
Micro-forming is a suited technology to manufacture very small metallic parts(several $mm{\sim}{\mu}m$). Micro-forming of $Zr_{62}Cu_{17}Ni_{13}Al_8$ bulk metallic glass(BMG) as a candidate material for this developing process are feasible at a relatively low stress in the supercooled liquid state without any crystallization during hot deformation. In this study, micro- formability of a representative bulk metallic glass, $Zr_{62}Cu_{17}Ni_{13}Al_8$. was investigated for micro-forging of U-shape pattern. Micro-formability was estimated by comparing $R_f$ values ($=A_f/A_g$), where $A_g$ is cross-sectional area of U groove, and $A_f$ the filled area by material. Micro-forging process was simulated and analyzed by applying finite element method. FEM simulation results showed reasonable agreement with the experimental results when the material properties and simulation conditions such as top die speed, remeshing criteria and boundary conditions were tightly controlled. The micro-formability of $Zr_{62}Cu_{17}Ni_{13}Al_8$ was increased with increasing load and time in the temperature range of the supercooled liquid state. Also, FEM simulation using a commercial software, DEFORM was confirmed to be applicable for the optimization of micro-forming process.