한국공작기계학회논문집 (Transactions of the Korean Society of Machine Tool Engineers)

한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

전자빔 가공기의 지능형 원격 빔 조절 기능의 개발

Development of Intelligent Remote Beam Control Function in E-Beam Manufacturing System

  • 임선종 (한국기계연구원 지능기계연구센터) ;
  • 유준 (충남대학교 전자공학과)
  • Published : 2006.04.01
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Abstract

The use electron-beam(E-beam) manufacturing system provides a means to alleviate optic exposure equipment's problems. We are developing an E-beam manufacturing system with scanning electron microscope(SEM) function. The E-beam manufacturing system consist of high voltage generator, beam blanker, condenser lenses, object lenses, stigmator and stage. The development of E-beam manufacturing system is used on the method of remaking SEM's structure. The functions of SEM are developed. It is important for the test of E-beam performance. In E-beam manufacturing system and SEM, beam focus is important function. In this paper, we propose intelligent remote control function for beam focus in E-beam manufacturing system. The function extends the user's function and gives convenience.

Keywords

References

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