마이크로 솔레노이드의 해석 및 설계

Analysis and Design of Micro Solenoid

Recently, the on-off solenoid valves have been focused on core technology in the fields of the production line of semi-conductor chips and the micro fluid chips for bio-medical applications. A key characteristics for on-off solenoid valve, operated by compressed air, are high speed response and great repeatability. Indeed, it is also important to keep the pressure on the cross-sectional area of the poppet to be constant regardless of the fluctuation of the pressure exerted on the ports. In this study, we have designed and analysed the high-speed and high flow rate on-off solenoid valve using the analogy of equivalent magnetic circuit and Finite Element Method (FEM) respectively. In case of poppet, flow field characteristics was analyzed by the variation of poppet and it was able to display flow field by changing the location of the poppet. Also, we verified possibility of the design through the static and dynamic pressure and the 3D simulation using distribution curve of the force by working the front poppet.