한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제23권2호
  • /
  • Pages.43-50
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  • 2006
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

Decoupled Type의 초정밀 이중 서보의 제어에 관한 연구

Control of Decoupled Type High Precision Dual-Servo

  • 남병욱 (한국과학기술원 기계공학과) ;
  • 김기현 (한국과학기술원 기계공학과) ;
  • 최영만 (한국과학기술원 기계공학과) ;
  • 김정재 (한국과학기술원 기계공학과) ;
  • 이석원 (삼성전자 메카트로닉스연구소 Micro Nano 기술연구팀) ;
  • 권대갑 (한국과학기술원 기계공학과)
  • 발행 : 2006.02.01
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초록

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

키워드

참고문헌

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