References
- K. M. Lakin, K. T. McCarron, J. Belsick, and J. F. McDonald, 'Thin Film Bulk Acoustic Wave Resonator and Filter Technology,' IEEE RAWCON, 89-92 (2001)
- D. Y. Lee, 'A Study on Electrical Charateristics of ZnO Thin Film for SAW Filter,' Kor. Institute Electrical Electronic Mater. Eng., 13 [7] 617-24 (2000)
- W. T. Lim and C. H. Lee, 'Highly Oriented ZnO Thin Films Deposited on Ru/Si Substrate,' Thin Solid Films, 353 12-5 (1999) https://doi.org/10.1016/S0040-6090(99)00390-9
- S. Y. Chu, W. Water, and J. T. Liaw, 'Influence of Post-deposition Annealing on the Properties of ZnO Films Prepared by RF Magnetron Sputtering,' J. Eur. Ceram. Soc., 23 1593-98 (2003) https://doi.org/10.1016/S0955-2219(02)00404-1
- M. K. Puchert, P. Y. Timbrell, and R. N. Lamb, 'Post-Deposition Annealing of Radio Frequency Magnetron Sputtered ZnO Films,' J. Vac. Sci. Tech. A, 14 [4] 2220-30
- W. T. Lim and C. H. Lee, 'Highly Oriented ZnO Thin Films Deposited on Ru/Si Substrates,' Thin Solid Films, 353 12-5 (1999) https://doi.org/10.1016/S0040-6090(99)00390-9
- A. C. Su, N. M. van der Pers, T. H. de Keyser, A. Venema, and M. J. Vellekoop, 'Stress Control of Piezoelectric ZnO Films on Silicon Substrates,' Smart Mat. and Structures, 5 744-50 (1996) https://doi.org/10.1088/0964-1726/5/6/003
- D. H. Zhang and D. E. Brodie, 'Effects of Annealing ZnO Films Prepared by Ion-Beam-Assisted Reactive Deposition,' Thin Solid Film, 238 95-100 (1994) https://doi.org/10.1016/0040-6090(94)90655-6
- W. Water and S. Y. Chu, 'Physical and Structural Properties of ZnO Sputtered Films,' Mater. Lett., 55 67-72 (2002) https://doi.org/10.1016/S0167-577X(01)00621-8