International Journal of Precision Engineering and Manufacturing

  • 제7권1호
  • /
  • Pages.13-17
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  • 2006
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  • 2234-7593(pISSN)
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  • 2005-4602(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

Thin Film Micromachining Using Femtosecond Laser Photo Patterning of Organic Self-assembled Monolayers

  • Chang Won-Seok (Nano Machining Team, Korea Institute of Machinery & Materials) ;
  • Choi Moo-Jin (Facilities Management Team, Busan Port Authority) ;
  • Kim Jae-Gu (Nano Machining Team, Korea Institute of Machinery & Materials) ;
  • Cho Sung-Hak (Nano Machining Team, Korea Institute of Machinery & Materials) ;
  • Whang Kyung-Hyun (Nano Machining Team, Korea Institute of Machinery & Materials)
  • 발행 : 2006.01.01
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초록

Self-Assembled Monolayers (SAMs) formed by alkanethiol adsorption to thin metal film are widely being investigated for applications as coating layer for anti-stiction or friction reduction and in fabrication of micro structure of molecules and bio molecules. Recently, there have been many researches on micro patterning using the advantages of very thin thickness and etching resistance of Self-Assembled Monolayers in selective etching of thin metal film. In this report, we present the several machining method to form the nanoscale structure by Mask-Less laser patterning using alknanethiolate Self-Assembled Monolayers such as thin metal film etching and heterogeneous SAM structure formation.

키워드

참고문헌

  1. Sun, S., Chong, K. S. L. and Leggett, G. J., 'Nanoscale molecular patterning fabricated by using scanning near-field optical lithography,' J. Am. Chem. Soc., Vol. 124, pp. 2414-2415, 2002 https://doi.org/10.1021/ja017673h
  2. http://www.zurich.ibm.com (Zurich Research Lab.)
  3. Lee, K. M., 'Mixed Self-Assembled Monolayers on the Si(100) Surface,' master's thesis paper, Chungbuk National University, pp. 1-3, 2001
  4. Brewer, N. J., Rawsterne, R. E., Kothari, S. and Legget, G. J., 'Oxidation of Self-Assembled Monolayers by UV Light with a Wavelength of 254 nm,' J. Am. Chem. Soc., Vol. 123, pp. 4089-4090, 2001 https://doi.org/10.1021/ja0155074
  5. Miura, Y. F., Takenaga, M., Koini, T., Graupe, M., Garg, N., Graham, R. L. and Lee, T. R., 'Wettabilities of self-assembled monolayers generated from CF3-Terminated Alkanethiols on Gold,' Langmuir, Vol. 14, pp. 5821-5825, 1998 https://doi.org/10.1021/la980154g
  6. Kumar, A., Biebuyck, H. A., Abbott, N. L. and Whitesides, G. M., 'The use of self-assembled monolayers and a selective etch to generate patterned gold features,' J. Am. Chem. Soc., Vol. 114, pp. 9188-9189, 1992 https://doi.org/10.1021/ja00049a061
  7. Tamada, K., Hara, M., Sasabe, H. and Knoll, W., 'Surface Phase Behavior of n-Alkanethiol Self-Assembled Monolayers Adsorbed on Au(111): An Atomic Force Microscope Study,' Langmuir, Vol. 13, pp. 1558-1566, 1997 https://doi.org/10.1021/la950630s
  8. Lewis, M. and Tarlov, M., 'Study of the photooxidation process of self-assembled alkanethiol monolayers,' J. Am. Chem. Soc., Vol. 117, pp. 9574-9575, 1995 https://doi.org/10.1021/ja00142a030
  9. Shin, B. S., Yang, S. B., Chang, W. S., Kim, J. G. and Kim J. M., 'Rapid Manufacturing of 3D-Shanped Microstructures by UV Laser Ablation,' Journal of the Korean Society of Precision Engineering Vol. 21, No. 7, July, 2004