Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Fabrication of 3-Dimensional Microstructures using Digital Micromirror Device

Digital Micromirror Device 를 이용한 3차원 마이크로구조물 제작

  • 최재원 (부산대학교 대학원 지능기계공학과) ;
  • 하영명 (부산대학교 대학원 지능기계공학과) ;
  • 최경현 (제주대학교 메카트로닉스공학과) ;
  • 이석희 (부산대학교 기계공학부 및 기계기술연구소)
  • Published : 2006.11.01
Download PDF
⟨ Previous Next ⟩

Abstract

MEMS and LIGA technologies have been used for fabricating microstructures, but their shape is not 3D because of difficulty for preparation of many masks. To fabricate 3D microstructures, microstereolithography technology based on Digital Micromirror Device($DMD^{TM}$) was introduced. It has no need of masks and is capable of fabricating high aspect ratio microstructures. In this technology, STL file is the standard format as the same of conventional rapid prototyping system, and 3D parts are fabricated by layer-by-layer according to 2D section sliced from STL file. The UV light source is illuminated to DMD which makes bitmap images of 2D section, and they are transferred and focused on resin surface. In this paper, we addressed optical design of microstereolithography system in consideration of light path according to DMD operation and image-forming on the resin surface using optical design program. To verify the performance of implemented microstereolithography system, 3D microstructures with complexity and high aspect ratio were fabricated.

Keywords

References

  1. Ikuta, K. and Hirowatari, K., 'Real three dimensional micro fabrication using stereolithography and metal molding,' Proceedings of the 6th IEEE Workshop on Micro Electro Mechanical Systems(MEMS'93), Fort Lauderdale, FL, USA, pp, 42-47, 1993 https://doi.org/10.1109/MEMSYS.1993.296949
  2. Ikuta, K., Ogata, T., Tsuboi, M. and Kojima, S., 'Development of mass productive micro stereo lithography,' Proceedings of the 8th IEEE Workshop on Micro Electro Mechanical Systems(MEMS'96), Piscataway, NJ, USA, pp. 301-306, 1996 https://doi.org/10.1109/MEMSYS.1996.493998
  3. Ikuta, K., Maruo, S. and Kojima, S., 'New micro stereo lithography for freely movable 3D micro structure - Super IH Process with submicron resolution,' Proceedings of the 11th IEEE Workshop on Micro Electro Mechanical Systems(MEMS'98), Heidelberg, Germany, pp. 290-295, 1998 https://doi.org/10.1109/MEMSYS.1998.659770
  4. Ikuta, K., Maruo, S., Fujisawa, T. and Yamada, A., 'Micro concentrator with opto-sense micro reactor for biochemical IC chip family - 3D composite structure and experimental verification,' Proceedings of the 12th IEEE Workshop on Micro Electro Mechanical Systems(MEMS'99), Orlando, Florida, USA, pp. 376-381, 1999 https://doi.org/10.1109/MEMSYS.1999.746858
  5. Ikuta, K., Hasegawa, T., Adachi, T. and Maruo, S., 'Fluid drive chips containing multiple pumps and switching valves for biochemical IC family,' Proceedings of the 8th IEEE Workshop on Micro Electro Mechanical Systems(MEMS 2000), pp. 739-744, 2000 https://doi.org/10.1109/MEMSYS.2000.838610
  6. Maruo, S., Ikuta, K. and Korogi, H., 'ForceControllable, Optically Driven Micromachines Fabricated by Single-Step Two-Photon Microstereolithography,' Journal of Microelectro mechanical Systems, Vol. 12, No. 5, pp. 533-539, 2003 https://doi.org/10.1109/JMEMS.2003.817894
  7. Lim, T. W., Park, S. H. and Yang, D. Y., 'Contour Offset Algorithm(COA) for Precise Patterning in Two-photon Polymerization,' Microelectronic Engineering, Vol. 77, pp. 382-388, 2005 https://doi.org/10.1016/j.mee.2005.01.022
  8. Zhang, X., Jiang, X. N. and Sun, C., 'Micro-stereolithography of polymeric and ceramic microstructures,' Sensors and Actuators 77, pp. 149-156, 1999 https://doi.org/10.1016/S0924-4247(99)00189-2
  9. Sun, C. and Zhang, X., 'Experimental and numerical investigations on microstereolithography of ceramics,' Journal of Applied Physics, Vol. 92, No.8, pp. 4796-4802, 2002 https://doi.org/10.1063/1.1503410
  10. Lee, I. H. and Cho, D. W., 'An Investigation on Photopolymer Solidification Considering Laser Irradiation Energy in Micro-stereolithography,' Microsystem Technologies, Vol. 10, No. 8, pp. 592-598, 2004 https://doi.org/10.1007/s00542-003-0337-4
  11. Varadan, V. K., Jiang, X. and Varadan, V. V., 'Microstereolithography and other Fabrication Techniques for 3D MEMS,' Wiley, 2001
  12. Lee, I. H., Cho, Y. H., Cho, D. W. and Lee, E. S., 'Development of micro-stereolithography system for the fabrication of three-dimensional micro-structures,' Journal of KSPE, Vol. 21, No. 2, pp. 186-194, 2004
  13. Lee, I. H., Cho, D. W. and Lee, E. S., 'Photopolymer Solidification Phenomena Considering Laser Exposure Conditions in Micro-stereolithography Technology,' Journal of KSPE, Vol. 21, No. 3, pp. 171-179, 2004
  14. Park, S. H., Lim, T. W. and Yang, D. Y, 'Investigation into direct fabrication of nano-patterns using nano-stereolithography(NSL) process,' Journal of KSPE, Vol. 23. No. 3, pp. 156-162, 2006
  15. Bertsch, A., Jezequel, J. Y. and Andre, J. C., 'Study of the spatial resolution of a new 3D microfabrication process: the microstereophotolithography using a dynamic mask-generator technique,' Journal of Photochemistry and Photobiology A: Chemistry 107, pp. 275-281, 1997 https://doi.org/10.1016/S1010-6030(96)04585-6
  16. Farsari, M., Claret-Tournier, F., Huang, S., Chatwin, C.R., Budgett, D.M., Birch, P.M., Young, R.C.D. and Richardson, J.D., 'A novel high-accuracy microstereolithography method employing an adaptive electro-optic mask,' Journal of Materials Processing Technology 107, pp. 167-172, 2000 https://doi.org/10.1016/S0924-0136(00)00672-5
  17. Provin, C. and Monneret, S., 'Complex Ceramic-Polymer Composite Microparts Made by Microstereolithography,' IEEE Transactions on Electronics Packaging Manufacturing, Vol. 25, No. 1, pp. 59-63, 2002 https://doi.org/10.1109/TEPM.2002.1000484
  18. Oda, G., Miyoshi, T., Takaya, Y, Ha, T. H. and Kimura, K., 'Microfabrication of Overhanging Shape using LCD Microstereolithography,' 5th International Symposium on Laser Precision Microfabrication, Proceedings of SPIE, Vol. 5662, pp. 649-654, 2004 https://doi.org/10.1117/12.596758
  19. Bertsch, A., Bernhard, P., Vogt, C. and Renaud, P., 'Rapid prototyping of small size objects,' Rapid Prototyping Journal, Vol. 6, No. 4, pp. 259-266, 2000 https://doi.org/10.1108/13552540010373362
  20. Smith, L. B., 'Micro-Cross-Sectional Lithography (${\mu}CLS^TM) :Prototyping and Packaging for MEMS,' Ph. D. Thesis, Rensselaer Polytechnic Institute, 2004
  21. Bertsch, A., Jiguet, S. and Renaud, P., 'Microfabrication of ceramic components by microstereolithography,' Journal of Micromechanics and microengineering, Vol. 14, pp. 197-203, 2004 https://doi.org/10.1088/0960-1317/14/2/005
  22. Limaye, A. S., 'Design and Analysis of a Mask Projection Micro-stereolithography System,' M.S. Thesis, Georgia Institute of Technology, 2004
  23. Sun, C., Fang, N., Wu, D. M. and Zhang, X., 'Projection micro-stereo lithography using digital micro-mirror dynamic mask,' Sensors and Actuators A: Physical, Vol. 121, No. 1, 31, pp. 113-120, 2005 https://doi.org/10.1016/j.sna.2004.12.011
  24. Choi, J. W., Ha, M. Y. Won, M. H., Choi, K. H. and Lee, S. H., 'Fabrication of 3-Dimensional Microstructures using Dynamic Image Projection,' Proceeding of the 1st International Conference on Precision Engineering and Micro/Nano Technology in Asia, Shenzhen, China, pp. 472-476, 2005