Progress in Superconductivity

한국초전도학회 (The Korean Superconductivity Society)
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질산염 무기금속 화합물의 분무열분해법에 의한 High-$J_c$ YBCO 박막 제조

Preparation of High $J_c$ YBCO Films on LAO by Spray Pyrolysis Process Using Nitrate Precursors

  • Hong, Suk-Kwan (Department of Advanced Materials Engineering, Korea Polytechnic University) ;
  • Kim, Jae-Gun (Department of Advanced Materials Engineering, Korea Polytechnic University) ;
  • Kim, Ho-Jin (FCB Development team, SAMSUNG ELECTRO-MECHANICS CO., LTD) ;
  • Cho, Han-Woo (Department of Advanced Materials Engineering, Korea Polytechnic University) ;
  • Yu, Seok-Koo (Department of Advanced Materials Engineering, Korea Polytechnic University) ;
  • Ahn, Jin-Hyun (Department of Advanced Materials Engineering, Korea Polytechnic University) ;
  • Joo, Jin-Hoo (Schools of Metallurgy and Materials Science Engineering, Sungkyunkwan University) ;
  • Lee, Hee-Gyoun (Department of Advanced Materials Engineering, Korea Polytechnic University) ;
  • Hong, Gye-Won (Department of Advanced Materials Engineering, Korea Polytechnic University)
  • 발행 : 2006.10.31
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초록

High $J_c$ over 1 $MA/cm^2$ YBCO film has been successfully prepared using nitrate precursors by spray pyrolysis method. Aerosol drolpets generated using a concentric spray nozzle were directly sprayed on a $LaAlO_3$(100) single crystal substrate. The cation ratio of precursor solution was Y:Ba:Cu=1:2.65:1.35. The distance between nozzle and substrate was 15 cm. Deposition temperature was ranging from $750^{\circ}C\;to\;800^{\circ}C$. Deposition pressure was 100 Torr, and oxygen partial pressure was varied from 10 Torr to 50 Torr. The microstructure, phase formation, texture development and superconducting properties of deposited films were largely changed with oxygen partial pressure. Deposited films showed a texture with(001) planes parallel to substrate plane. High quality film was obtained when film was deposited at $760^{\circ}C$ with an oxygen partial pressure of 30 Torr. The critical current density($J_c$) of the YBCO film was 1.75 $MA/cm^2$ at 77 K and self-field.

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