Transactions on Electrical and Electronic Materials

  • 제7권5호
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  • Pages.271-275
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  • 2006
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  • 1229-7607(pISSN)
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  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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AZO Films Prepared by Facing Target Sputtering System

  • Kim, Kyung-Hwan (Department of Electrical & Information Engineering, Kyungwon University)
  • 발행 : 2006.10.01
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초록

Al oped zinc oxide (AZO) films were prepared by Facing Targets Sputtering (FTS) system for TCO applications. The electrical, optical and structural properties of AZO thin films have been investigated with input current, oxygen gas flow ratio and substrate temperature. Deposition was carried out at room temperature and $200^{\circ}C$. Working gas pressures were fixed at 1mTorr. As a result, AZO thin film deposited with an optical transmittance over 80 % and a resistivity about $10^{-4}{Omega}{\cdot}cm$.

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참고문헌

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피인용 문헌

  1. Homogeneous multi-layered films of SiO x and SiO x N y deposited on PEN by using a facing target sputtering system for passivation of organic light emitting diodes vol.63, pp.6, 2013, https://doi.org/10.3938/jkps.63.1181
  2. Preparation of SiO$_{2}$ Passivation Thin Film for Improved the Organic Light-Emitting Device Life Time vol.50, pp.8, 2011, https://doi.org/10.1143/JJAP.50.08KE02
  3. Preparation of SiO2Passivation Thin Film for Improved the Organic Light-Emitting Device Life Time vol.50, pp.8S2, 2011, https://doi.org/10.7567/JJAP.50.08KE02
  4. Enhanced Permeability Property of Silicon Oxide Thin Films Deposited by Facing Target Sputtering System for OLED Application vol.626, pp.1, 2016, https://doi.org/10.1080/15421406.2015.1075845
  5. Homogeneous Al2O3Multilayered Films Deposited on Poly(ethylene terephthalate) by Facing-Target Sputtering System for Thin-Film Passivation of Organic Light-Emitting Diodes vol.52, pp.12R, 2013, https://doi.org/10.7567/JJAP.52.126201