PLD를 이용한 ZnO 박막의 후열처리에 관한 연구

Effects of Post-Annealing Treatment of ZnO Thin Films by Pulsed Laser

  • 이천 (인하대 전기공학과) ;
  • 김재홍 (인하대 전기공학과)
  • 발행 : 2005.03.01

초록

ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266nm. Before post-annealing treatment in the oxygen ambient, the experiment of the deposition of ZnO thin films has been performed for substrate temperatures in the range of $300\~450^{\circ}C$ and oxygen gas flow rate of $100\~700\;sccm$. In order to investigate the effect of post-annealing treatment of ZnO thin films, films have been annealed at various temperatures after deposition. After post-annealing treatment in the oxygen ambient, the structural properties of ZnO thin films were characterized by X-ray diffraction(XRD), scanning electron microscopy(SEM) and the optical properties of the ZnO were characterized by photoluminescence(PL).

키워드

참고문헌

  1. Simon L. King, J.G.E. Gardeniers, 'Pulsed-laser deposited ZnO for device applications.' Applied surface science, pp. 811-818, 1996 https://doi.org/10.1016/0169-4332(96)80027-4
  2. Y.L Liu, Y.C. Liu, 'Structural and optical properties of nanocrystalline ZnO films grown by cathodic electrodeposition on Si substrates.' Applied physics B, 2000
  3. Maria Dinescu, P. Verardi, 'ZnO thin film deposition by laser ablation of Zn target in oxygen reactive atmosphere,' Applied surface science, pp. 149-153, 1996 https://doi.org/10.1016/S0169-4332(97)80013-X
  4. Y.R. Ryu, S. Zhu, 'Synthesis of p-type ZnO films,' Journal of crystal growth, pp. 330-334, 2000 https://doi.org/10.1016/S0022-0248(00)00437-1
  5. S. Muthukumar, C.R. Gorla, 'Control of morphology and orientation of ZnO thin films grown on $SiO_2$/ Si substrates,' Journal of crystal growth, pp. 197-201, 2001 https://doi.org/10.1016/S0022-0248(01)00874-0
  6. K. Ogata, S.-W. Kim, 'ZnO growth on Si substrates by metalorganic vapor phase epitaxy,' Journal of crystal growth, pp, 112-116, 2002 https://doi.org/10.1016/S0022-0248(02)00911-9
  7. V. Srikant, J. S. Speck, and D. R. Clarke. Mosaic 'structure in epitaxial thin films having large lattice mismatch.' Journal of Applies Physics. Vol 82, No9, pp, 4286-4295 https://doi.org/10.1063/1.366235
  8. Zhai. Jiwei, Zhang Liangying, 'The dielectric properties and optical propagation loss of c-axis oriented ZnO thin films deposited by sol gel process,' Ceramics international, pp, 883-885, 2000 https://doi.org/10.1016/S0272-8842(00)00031-6
  9. Y.R. Ryu, S. Zhu, 'ZnSe and ZnO film growth by pulsed laser deposition,' Applied surface science, pp, 127-129, 1998 https://doi.org/10.1016/S0169-4332(97)00681-8
  10. C. Kittel, 'Introduction to solid state physics', John Wiley and Son, New York, 7th ed. p. 58, 1996
  11. J. M. Myoung, W. H. Yoon, and D. H. Lee, 'Effect of thickness variation on properties of ZnO thin films grown by pulsed laser deposition', Jpn. J. Appl, Phys., Vol. 41, p. 28, 2002 https://doi.org/10.1143/JJAP.41.28
  12. M. Kawasaki, A. Ohtomo, I. Ohkubo, H. Koinuma, Z. K. Tang, P. Yu, G. K. L. Wong, B. P. Ahang, Y Segawa, Excitonic ultraviolet laser emission at room temperature from naturally made cavity in ZnO nanocrystal thin film', Materials Science and Engineering B, Vol. 56, p. 239, 1998 https://doi.org/10.1016/S0921-5107(98)00248-7
  13. Y. M. Sun, Ph. D, thesis, University of Science and Technology of China, July, 2000
  14. N. Fujimura, T. Nishihara, S. Goto, et al., Crystal Growth 130, p. 269, 1993 https://doi.org/10.1016/0022-0248(93)90861-P
  15. D.M. Bagnall, Y.F. Chen, Z. Zhu, et al., Appl, Phys. Lett. 73, p. 1038. 1998 https://doi.org/10.1063/1.122077
  16. J. Arokiaraj, H. S. Djie, T. Mei, 'Investigation on the blue-shift phenomena in argon plasma intermixed InGaAs/lnGaAsP quantum well structure', Applied surface science, 237, p. 256-260, 2004 https://doi.org/10.1016/j.apsusc.2004.06.083