DOI QR코드

DOI QR Code

레이저 화학증착을 이용한 3차원 쾌속조형에 관한 실험적 연구

Experimental Study of 3-Dimensional Rapid Prototyping by Laser Chemical Vapor Deposition

  • 발행 : 2005.01.01

초록

Laser chemical vapor deposition can be an effective technique for a rapid prototyping with ceramic materials, in particular. The objective of the study is to fabricate several 3-dimensional objects by stacking multi-layers as well as to find out some basic aspects of a rapid prototyping with laser chemical vapor deposition such as deposition characteristics with traversing speed of the laser, possible problems in stacking multi-layers etc. The limit speed of the laser that can grow a tilted SiC rod was found in this study, and laser directing writing that occurs over the limit speed was also investigated. Finally, a zigzag-shaped rod, a spiral-shaped rod, a wall and a square duct were successfully fabricated with laser chemical vapor deposition of tetramethylsilane

키워드

참고문헌

  1. Zong, G-S, 1991, 'Solid Freeform Fabrication Using Gas Phase Selective Area Laser Deposition,' Ph. D. Dissertation, The University of Texas at Austin
  2. Birmingham, R. B., 1995, 'Laser Based Solid Freeform Fabrication of Ceramic and Metal/Ceramic Shapes,' Ph. D. Dissertation, The University of Texas at Austin
  3. Harrison, S. and Marcus, H. L., 1999, 'Gas-phase Selective Area Laser Deposition (SALD) Joining of SiC,' Materials & Design, Vol. 20, pp. 147-152 https://doi.org/10.1016/S0261-3069(99)00021-7
  4. Thissell, W. R., 1994, 'Processing and Control of Selective Area Laser Deposition from Methane and Hydrogen,' Ph. D. Dissertation, The University of Texas at Austin
  5. Jakubenas, K. J., Sanchez, J. M. and Marcus, H. L., 1998, 'Multiple Material Solid Free-Form Fabrication by Selective Area Laser Deposition,' Materials & Design, Vol. 19, pp. 11-18 https://doi.org/10.1016/S0261-3069(98)00004-1
  6. Maxwell, J. L., Pegna, J., Messia, D. and DeAngelis, D., 1996, 'Direct Feedback Control of Gas-Phase Laser-Induced Deposition,' Proceedings of the Solid Freeform Fabrication Symposium, The University of Texas at Austin, pp. 227-237
  7. Lee, Y. L., 2002, 'Study of Laser Chemical Vapor Deposition of Silicon Carbide from Tetramethylsilane,' Trans. of the KSME, Series B, Vol.. 26, No.9, pp. 1226-1233 https://doi.org/10.3795/KSME-B.2002.26.9.1226
  8. Lee, Y. L. and Ryu, J. E., 2004, 'Experimental Study of the Growth of the SiC Rod Using Nd-Yag Laser Chemical Vapor Deposition,' Trans. of the KSME, Series A, Vol.. 28, No.4, pp.481-488 https://doi.org/10.3795/KSME-A.2004.28.4.481
  9. Figueras, A., Garelik, S., Santiso, J., Rodriguez-Clemente, R., Armas, B., Combescure, C., Berjoan, R., Saurel, J. M. and Caplain, R., 1992, 'Growth and Properties of CVD-SiC Layers Using Tetamethylsilane,' Mater. Sci. Eng., Vol.. B, No. B11, pp. 83-87