DOI QR코드

DOI QR Code

고밀도 광학헤드를 위한 Bimorph 압전 액추에이터의 동특성 해석 및 위치제어

Dynamic Characteristic Analysis and Position Control for High Density Optical Head Using Bimorph PZT

  • 박태욱 (연세대학교 정보저장기기 연구센터) ;
  • 박노철 (연세대학교 정보저장기기 연구센터) ;
  • 양현석 (연세대학교 정보저장기기 연구센터) ;
  • 박영필 (연세대학교 정보저장기기 연구센터) ;
  • 권영기 (삼성전자 디지털프린팅 사업부)
  • 발행 : 2005.01.01

초록

This paper proposed a dual actuator using Bimorph PZT for information storage device based on prove array NSOM(near-field scanning optical microscopy). The gap between the media and the optical head should be maintained within the optical tolerance. Therefore, a new actuator having high sensitivity is required. Bimorph PZT, which has fast access time and high sensitivity characteristic, is suitable for this precise actuating system. This paper is focused on derivation of mathematical model of dual Bimorph PZT actuator and control algorithm. Hamilton's principle was used for mathematical model. The model is verified by FEA(finite element analysis), and compared with experimental results. Different control algorithms were used for two Bimorph PZT actuating same direction and opposite direction. The gap between recording media and optical head was controlled within 20nm in experiment.

키워드

참고문헌

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