참고문헌
- Paros, J. M. and Weisbord, L., 'How to Design Flexure Hinges,' Machine Design, Vol. 37, pp. 151-156,1965
- Yoshimura, Y., 'Analysis on Stiffness of Elastic Hinges,' J. of Japan Society for Precision Engineering (in Japanese), Vol. 64, No. 11, pp. 1589-1593, 1998 https://doi.org/10.2493/jjspe.64.1589
- Koseki, Y., Tanikawa, T. and Koyachi, N., 'Kinematic Analysis of Translational 3-DOF Micro Parallel Mechanism Using Matrix Method,' In Proceedings of the 2000 IEEE/RSJ International Conference on Intelligent Robots and Systems, pp. 786-792, 2000 https://doi.org/10.1109/IROS.2000.894700
- Lobontiu, N. and Paine, J. S. N., 'Design of Circular Cross-Section Corner-Filleted Flexure Hinges for Three-Dimensional Compliant Mechanisms,' Journal of Mechanical Design, Vol. 124, pp. 479-484,2002 https://doi.org/10.1115/1.1480022
- Lobontiu, N., Paine, J. S. N., O'Malley, E. and Samuelson, M., 'Parabolic and Hyperbolic Flexure Hinges: Flexibility, Motion Precision and Stress Characterization Based on Compliance Closed-From Equations,' Precision Engineering, Vol. 26, pp. 183-192, 2002 https://doi.org/10.1016/S0141-6359(01)00108-8
- Elmustafa, A. A. and Lagally, M. G., 'Flexural-hinge Guided Motion Nanopositioner Stage for Precision Machining: Finite Element Simulations,' Precision Engineering, Vol. 25, pp. 77-81, 2001 https://doi.org/10.1016/S0141-6359(00)00058-1
-
Chang, S. H., Tseng, C. K. and Chien, H. C., 'An Ultra-precision
$XY{\theta}_z$ Piezo-Micropositioner Part I: Design and Analysis,' IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 46, No.4, pp. 897-905, 1999 https://doi.org/10.1109/58.775656 - Smith, S. T., Chetwynd, D. G. and Bowen, D. K., 'Design and Assessment of Monolithic High Precision Translation Mechanisms,' J. Phys. E: Sci. Instrum. Vol. 20, pp. 977-983, 1987 https://doi.org/10.1088/0022-3735/20/8/005
- Yang, R., Jouaneh, M. and Schweizer, R., 'Design and Characterization of a Low-Profile Micro positioning Stage,' Precision Engineering, Vol. 18, pp. 20-29, 1996 https://doi.org/10.1016/0141-6359(95)00032-1
- Gao, P., Tan, H. and Yuan, Z., 'The Design and Characterization of a Piezo-driven Ultra-precision Stepping Positioner,' Meas. Sci. Technol., Vol.11, N15-N19, 2000 https://doi.org/10.1088/0957-0233/11/2/401
-
Scire, F. E. and Teague, E. C., 'Piezodriven 50-
${\mu}m$ Range Stage with Subnanometer Resolution,' Rev. Sci. Instrum., Vol. 49, No. 12, pp. 1735-1740, 1978 https://doi.org/10.1063/1.1135327 - Ryu, J. W., 6-Axis Ultraprecision Positioning Mechanism Design and Positioning Control, PhD. thesis, Korea Advanced Institute of Science and Technology, 1997
- Smith, S. T., Flexures: Elements of Elastic Mechanisms, Gordon and Breach Science Publishers, 2000
- Craig, J. J., Introduction to Robotics: Mechanics & Control, Addison-Wesley Publishing Company, 1986