Abstract
As the structure of the piezoelectric bimorph cantilever becomes increasingly more complicated, a more accurate and efficient analysis of piezoelectric media is needed. In this paper, the piezoelectric transducer is analyzed by using the three-dimensional finite element method. The validity of the three-dimensional finite element routine is confirmed by comparing the experimental result. The resonance characteristics, such as resonance frequency and anti-resonance frequency, of the piezoelectric cantilever are calculated by the experimentally verified three dimensional finite element method. Subsequently, the characteristics, such as mechanical displacement and impedance, are calculated at the resonance frequency. Besides, to design the piezoelectric bimorph cantilever shape that maximizes displacement at the tip, the ES (Evolution Strategy) algorithm is applied. Finally, optimal design for the fan of the piezoelectric cantilever is fulfilled to obtain maximum displacement at the tip. From these results, the application potentiality of the piezoelectric bimorph cantilever fan is identified.