KIEE International Transactions on Electrophysics and Applications

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

Sawtooth Fingered Comb Drive Actuator for Greater Displacement

  • Ha Sang Wook (Dept. of Electrical Engineering, Korea University) ;
  • Oh Sang-Woo (Dept. of Mechanical Engineering, Korea University) ;
  • Hahm Ju-Hee (Dept. of Electrical Engineering, Korea University) ;
  • Kim Kwon Hee (Dept. of Electrical Engineering, Korea University) ;
  • Pak James Jungho (Dept. of Electrical Engineering, Korea University)
  • 발행 : 2005.12.01
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초록

The electrostatic comb drive actuator is one of the main building blocks in the field of micro electro-mechanical systems (MEMS). Most of the comb actuators presented previously have fingers that are rectangular in shape which produce a stable, constant force output during actuation. The use of sawtooth fixed fingers in a comb drive, which were presumed to produce an increasing force output with displacement due to the increased number of regions where fringing force, the driving force of comb actuators, appear. The dimensions of the sawtooth were derived from finite element analysis (FEA) of simplified finger models with sawtooth type fingers of various dimension and were compared to the rectangular finger model that showed that the sawtooth type fingers have $7\~9$ times stronger driving force. Finally, comb drive actuators with sawtooth type and rectangular fingers were fabricated and although the gap was bigger, the comb actuator with sawtooth type fingers showed about 1.7 times greater electrostatic force than the one with rectangular fingers at equal driving voltages. In conclusion, using the proposed sawtooth type comb fingers in a comb drive makes it possible to increase its displacement or reduce the driving voltage.

키워드

참고문헌

  1. W. C. Tang, Ph.D. dissertation, Univ. California, Berkeley, CA, pp. 10-22, 1990
  2. M-H. Kiang, O. Solgaard, K. Y. Lau, R. S. Muller, 'Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning,' J. MEMS, Vol. 7, No. 1, pp. 27-37, 1998
  3. C. J. Kim, A.P. Pisano, R.S. Muller, M.G. Lim, 'Polysilicon microgripper,' Solid-State Sensor and Actuator Workshop, 4th Technical Digest, pp. 48-51, June, 1990
  4. J. J. Yao, S. C. Arney, N. C. MacDonald, 'Fabrication of high frequency two-dimensional nanoactuators for scanned probe devices,' J. MEMS, Vol. 1, No. 1, pp. 14-22, 1992
  5. K. Wang, C. T.-C. Nguyen, 'High-order medium frequency micromechanical electronic filters,' J. MEMS, Vol. 8, No. 4, pp. 534-557, 1999
  6. W. C. Tang, T. C. Nguyen, R. T. Howe, 'Laterally driven polysilicon resonant microstructures,' Sens. Actuators, Vol. 20, pp. 25-32, 1989 https://doi.org/10.1016/0250-6874(89)87098-2
  7. A. P. Lee, A. P. Pisano, 'Polysilicon angular microvibromotors,' J. MEMS., Vol. 1, pp. 70-76, 1992 https://doi.org/10.1109/84.157360
  8. E. J. Garcia, J. J. Sniegowski, 'Surface micromachined microengine as the driver for micromechanical gears,' 8th Int. Conf. on Solid-State Sens. Actuators, Transducers '95 (Stockholm, Sweden, 1995), pp. 365- 368
  9. W. H. Jaun, S. W. Pang, 'Released Si microstructures fabricated by deep etching and shallow diffusion,' J. MEMS, Vol.5, No.1, pp. 18-23, 1996
  10. T. Hirano, T. Furuhata, K. J. Gabriel, H. Fujita, 'Design, fabrication, and operation of submicron gap comb-drive microactuators,' J. MEMS, Vol. 1, No. 1, pp. 53-59, 1992
  11. B.D. Jensen, S. Mutlu, S. Miller, K. Kurabayashi, J. J. Allen, 'Shaped comb fingers for tailored electromechanical restoring force,' J. MEMS, Vol. 12, No. 3, pp. 373-383, 2003