근접장 나노광학 기술과 응용

Near-field Nano-Optics and Its Applications

  • 장원석 (한국기계연구원 나노공정장비연구센터 나노공정팀) ;
  • 황경현 (한국기계연구원 나노공정장비연구센터 나노공정팀) ;
  • 김진범 (한국과학기술원 기계공학과) ;
  • 나석주 (한국과학기술원 기계공학과)
  • 발행 : 2005.12.01

초록

키워드

참고문헌

  1. Hecht, E., 'Optics 3rd ed. Addison Wesley,' p.464, 1998
  2. Synge, E. H., 'A Suggested Method for Extending Microscopic Resolution into the Ultra-Microscopic Region,' The London, Edinburgh and Dublin Phil. Mag. & J. Science, Vol. 6, pp. 356-352, 1928
  3. Bethe, H. A., 'Theory of Diffraction by Small Holes,' Phys. Rev. Vol. 66, No.7, pp. 163-182, 1944 https://doi.org/10.1103/PhysRev.66.163
  4. Bowkamp, C. J., 'On Bethe's Theory of Diffraction by Small Holes,' Phils. Res. Rep., Vol. 5, No.5, pp. 321-332, 1950
  5. Ohtsu, M., 'Near-field Nano/Atom Optics and Technology,' Springer-Verlag, 1998
  6. Binnig, G., Rohrer, H., Gerber, Ch. and Weibel, E., 'Scanning Tunneling Microscopy,' Phys. Rev. Lett., Vol. 49, pp. 726-735,1982 https://doi.org/10.1103/PhysRevLett.49.726
  7. Binnig, G., Quate, C. F. and Gerber, C., 1986, 'Atomic Force Microscope,' Phys. Rev. Lett., Vol. 56, pp.930-933 https://doi.org/10.1103/PhysRevLett.56.930
  8. Betzig, E., Grubb, S. G., Chichester, R. J., DiGiovanni, D. J. and Weiner, J. S., 'Fiber Laser probe for Near-field Scanning Optical Microscopy,' Appl. Phys. Lett., Vol, 63, No. 26, pp. 3550-3552., 1993 https://doi.org/10.1063/1.110093
  9. Pohl, D. W. and Novotny, L., 'Near-field Optics: Light for the World of Nano,' J. Vac. Sci. & Tech., Vol, 12, No.3, pp. 1441-1446, 1994 https://doi.org/10.1116/1.587313
  10. Cline, J. A. and Isaacson, M., 'Comparison of Different Modes of Reflection in Near-field Optical Imaging,' Ultramicroscopy, Vol, 57, pp. 147-152, 1995 https://doi.org/10.1016/0304-3991(94)00126-8
  11. Shi, X. and Hesselink, L., 'Design of a C Aperture to Achieve ${\lambda}$/10 Resolution and Resonant Transmission,' J. Opt. Soc. America, Vol, 21, No.7, pp. 1305-1317, 2004 https://doi.org/10.1364/JOSAB.21.001305
  12. Tanaka, K. and Tanaka, M., 'Optimized Computer-Aided Design of I-Shaped Subwavelength Aperture for High Intensity and Small Spot Size,' Opt. Comm., Vol, 233, pp. 231-244, 2004 https://doi.org/10.1016/j.optcom.2004.01.028
  13. Ono, T., Iwami, K. and Esashi, M., 'Micromachined Optical Near-field Bow-Tie Antenna Probe with Integrated Electrostatic Actuator,' Jpn. J. Appl. Phys., Vol, 44, No. 14, pp. L445-L448, 2005 https://doi.org/10.1143/JJAP.44.L445
  14. Veerman, J. A., Otter, A. M., Kuipers, L. and van Hulst, N. F., 'High Definition Aperture Probes for Near-field Optical Microscopy Fabricated by Focused Ion Beam Milling,' Appl. Phys. Lett., Vol, 72, pp. 3115-3119,1998 https://doi.org/10.1063/1.121564
  15. Frey, H. G., Witt, S., Felderer, K. and Guckenberger, R., 'Enhancing the Resolution of Scanning Nearfield Optical Microscopy by a Metal Tip Grown on an Aperture Probe,' Appl. Phys. Lett., Vol, 81, No. 26, pp.5030-5032,2002 https://doi.org/10.1063/1.1530736
  16. Kim, J. B., Na, S. J. and Chang, W. S., 'A Study on Electro-Magnetic Energy Distribution of Modified Probe for NSOM-lithography,' 8th Int. Conf. On Laser Ablation, Banff, Canada, p. 370,2005
  17. Riehn, R. Charas, A., Morgada, J. and Caciallli, F., 'Near-field Optical Lithography of a Conjugated Polymer,' Appl. Phys. Lett., Vol, 82, No.4, pp. 526-528,2003 https://doi.org/10.1063/1.1539278
  18. Aoki, H. and Ito, S., 'Near-field Photo-Patterning of Ultra-Thin Polymer Films,' Thin Solid Films, Vol, 449,pp. 226-230, 2004 https://doi.org/10.1016/S0040-6090(03)01412-3
  19. Kwon, S., Chang, W. and Jeong, S., 'Shape and Size Variations During Nanopatterning of Photoresist Using Near-field Scanning Optical Microscope,' Ultramiroscopy, Vol. 105, pp. 316-323, 2005 https://doi.org/10.1016/j.ultramic.2005.06.043
  20. Takahashi, S., Samata, K., Muta, H., Machida, S. and Horie, K., 'Refractive-index Patterning Using Nearfield Scanning Optical Microscopy,' Appl. Phys. Lett., Vol. 78, No.1, pp. 13-15, 2001 https://doi.org/10.1063/1.1336164
  21. Cacialli, F., Riehn, R., Downes, A., Latini, G., Charas, A. and Morgado, J., 'Fabrication of Conjugated Polymers Nanostructures Via Direct Near-field Optical Lithography,' Ultramicroscopy, Vol. 100, pp.449-455, 2004 https://doi.org/10.1016/j.ultramic.2003.12.016
  22. Sun, S. and Leggett, G. J., 'Generation of Nanostructures by Scanning Near-field Photolithography of Self-Assembled Monolayers and Wet Chemical Etching,' Nano Letters, Vol. 2, No. 11, pp. 1223-1227,2002 https://doi.org/10.1021/nl025754lS1530-6984(02)05754-5
  23. Choi, M., Chang, W., Kim, J., Cho, S. and Whang, K., 'Micromachining Thin Film Using Femtosecond Laser Photo Patterning of Organic Self-Assembled Monalayers,' J. Korean Society of Precision Engineering, Vol. 21, No. 12, pp. 160-166,2004