반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

공기부상방식 웨이퍼 이송시스템의 추진 노즐 크기에 따른 추진력계수에 관한 연구

Propulsion Force Coefficient of Injection Nozzle Size on Air Levitation Type Wafer Transfer System

  • 문민호 ((주)신성이엔지 기술연구소) ;
  • 조상준 ((주)신성이엔지 기술연구소) ;
  • 황영규 (성균관대학교 기계공학부)
  • Moon, In-Ho (Institute of Technology Shinsung ENG Co.LTD) ;
  • Cho, Sang-Joon (Institute of Technology Shinsung ENG Co.LTD) ;
  • Hwang, Young-Kyu (Department of Mechanical Engineering, Sungkyunkwan University)
  • 발행 : 2005.03.01
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초록

An air levitation type wafer transfer system is composed of control and transfer track. Wafer transfer speed is mainly affected by air velocity of propulsion nozzle. In this study, the propulsion force coefficient was evaluated experimentally for the nozzle with 0.5mm, 0.8mm, and 1.0mm diameter. As a result, the propulsion force was largest in the smallest size of nozzle at same air velocity. The propulsion force coefficient of nozzle increases with reducing diameter of nozzle. This increment of propulsion force coefficient was enlarged remarkably at the 0.5mm diameter of nozzle.

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