Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 4 Issue 1 Serial No. 10
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- Pages.35-41
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- 2005
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- 1738-2270(pISSN)
Propulsion Force Coefficient of Injection Nozzle Size on Air Levitation Type Wafer Transfer System
공기부상방식 웨이퍼 이송시스템의 추진 노즐 크기에 따른 추진력계수에 관한 연구
- Moon, In-Ho (Institute of Technology Shinsung ENG Co.LTD) ;
- Cho, Sang-Joon (Institute of Technology Shinsung ENG Co.LTD) ;
- Hwang, Young-Kyu (Department of Mechanical Engineering, Sungkyunkwan University)
- Published : 2005.03.01
Abstract
An air levitation type wafer transfer system is composed of control and transfer track. Wafer transfer speed is mainly affected by air velocity of propulsion nozzle. In this study, the propulsion force coefficient was evaluated experimentally for the nozzle with 0.5mm, 0.8mm, and 1.0mm diameter. As a result, the propulsion force was largest in the smallest size of nozzle at same air velocity. The propulsion force coefficient of nozzle increases with reducing diameter of nozzle. This increment of propulsion force coefficient was enlarged remarkably at the 0.5mm diameter of nozzle.
Keywords
- Wafer Transfer System;
- Air Levitation;
- Propulsion Force Coefficient;
- Injection Nozzle;
- Control Track