Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)
- Volume 12 Issue 3 Serial No. 36
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- Pages.267-274
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- 2005
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- 1226-9360(pISSN)
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- 2287-7525(eISSN)
Improving Sensitivity of SAW-based Pressure Sensor with Metal Ground Shielding over Cavity
- Lee, Kee-Keun (Division of Electronics Engineering Ajou University) ;
- Hwang, Jeang-Su (Division of Electronics Engineering Ajou University) ;
- Wang, Wen (Division of Electronics Engineering Ajou University) ;
- Kim, Geun-Young (Division of Electronics Engineering Ajou University) ;
- Yang, Sang-Sik (Division of Electronics Engineering Ajou University)
- Published : 2005.09.01
Abstract
This paper presents the fabrication of surface acoustic wave (SAW)-based pressure sensor for long-term stable mechanical compression force measurement. SAW pressure sensor has many attractive features for practical pressure measurement: no battery requirement, wireless pressure detection especially at hazardous environments, and easy other functionality integrations such as temperature, humidity, and RFID. A