Abstract
This paper studied Rotary type ultrasonic motor which has cross type stator. The stator consists of hollowed cross type metal which has four piezoelectric ceramics on the ends of cross bars. When two harmonic voltages which have 90$^{\circ}$ phase difference given to ceramics, the elliptical motion was generated in the inside tips. Inside tips are contact with rotor and these elliptical motions are rotate the rotor The finite element analysis was used to optimize the dimension and displacement of the stator. And the analyzed results were compared with the experimental results of the motor. As results, the speed and the torque of motor was increased by increasing width of the cross bar. And the speed and torque o( motor was not influenced to length of cross bar. The speed and torque was linearly increased by increasing voltage. The maximum torque was generated when the motor fabricated length of cross bar and width of ceramics in the ratio of 1:2.
