참고문헌
- Y. A. Jeon, K. S. No, J. S. Kim, Y. S. Yoon, 2003, Characteristics of ZnO thin film deposited on various metal bottom electrodes, Metals and Materials Int., vol. 9, no. 4, pp. 383-387 https://doi.org/10.1007/BF03027192
- S. Greek, S. Johansson, 1997, Tensile testing of thin film microstructures, Proc. SPIE, vol. 3224, pp. 344-351
- T. Tsuchiya, O. Tobato, J. Sakata, Y. Taga, 1998, Specimen size effect on tensile strength of surfacemicromachined polycrystalline silicon thin films, J. Microelectromech. Syst., vol. 7, pp. 106-113 https://doi.org/10.1109/84.661392
- H. Ogawa, K. Susuki, S. Kaneko, Y. Nakano, Y. Ishikawa, T. Kitahara, 1997, Measurement of mechanical properties of micro fabricated thin film, Proc. IEEE Micro Electro Mechanical Systems Workshop, pp. 430-435
- I. Chasiotis, W. Knauss, 1998, Mechanical properties of thin polysilicon films by means of probe microscopy, Proc. SPIE, vol. 3512, pp. 66-75
- W. N. Sharpe Jr., 1989, An interferometric strain/displacement measurement system, NASA Technical Memorandum 101638
- W. N. Sharpe Jr., B. Yuan, R. L. Edwards, 1997, A new technique for measuring the mechanical properties of thin films, J. Microelectromech. Syst., vol. 6, pp. 193-199 https://doi.org/10.1109/84.623107
- W. N. Sharpe Jr., D. A. LaVan, R. L. Edwards, 1997, Mechanical properties of LIGA-deposited nickel for MEMS transducers, Proc. Int. Conf. Solid-State Sensors and Actuators, pp. 607-610
- T. Yi, C. J. Kim, 1999, Microscale material testing: etchant effect on the tensile strength, Proc. Int. Conf. Solid-State Sensors and Actuators, pp. 518-521
- T. Yi, Lu Li, C. J Kim, 2000, Microscale material testing of single crystalline silicon: process effects on surface morphology and tensile strength, Sensors and Actuators A: Physical, vol. 83, Issues 1-3, pp. 172-178 https://doi.org/10.1016/S0924-4247(00)00350-2