소성∙가공 (Transactions of Materials Processing)

  • 제14권5호
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  • Pages.477-481
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  • 2005
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  • 1225-696X(pISSN)
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  • 2287-6359(eISSN)
한국소성∙가공학회 (The Korean Society for Technology of Plasticity and materials processing)
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마이크로 UV성형을 통한 초소형 광픽업용 마이크로 미러 어레이 제작

Fabrication of Micro Mirror Array for Small Form Factor Optical Pick-up by Micro UV-Molding

  • 발행 : 2005.08.01
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초록

Wafer scale micro mirror array with high surface quality for small form factor (SFF) optical pick-up was fabricated by micro UV-molding. To replicate micro mirror array for SFF optical pick-up, a high- precision mold was fabricated using micro-machining technology. Wafer scale micro mirror array was UV-molded using the mold and then the process was optimized experimentally. The surface flatness and roughness of UV-molded micro mirror array were measured by white light scanning interferomety system and analyzed the transcribing characteristics. Finally, the measured flatness of UV-molded micro mirror away for SFF optical pick-up, which was fabricated in the optimum processing condition, was less than 70nm.

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참고문헌

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