Reviews on Micro Electro Mechanical Systems (MEMS)

MEMS 기술의 개요

  • Choi, Chang-Kyung (Micro/Nano-Scale Fluidics and Energy Transport Laboratory Mechanical, Aerospace and Biomedical Engineering University of Tennessee) ;
  • Doh, Deog-Hee (Micro/Nano-Flow Visualization Laboratory Division of Mech. & Info. Eng. Korea Maritime University)
  • Published : 2005.07.01