Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)
- Volume 12 Issue 1 Serial No. 34
- /
- Pages.1-7
- /
- 2005
- /
- 1226-9360(pISSN)
- /
- 2287-7525(eISSN)
Effect of Manufacturing Parameters on Characteristic of Thin Film Resistor
박막저항기 특성에 미치는 제조 공정 인자의 영향
-
Park Hyun-Sik
(Dept. of Electronic Eng., Dept. of Information and Control Eng., Hankyong National University) ;
- Yu Yun-Seop (Dept. of Electronic Eng., Dept. of Information and Control Eng., Hankyong National University)
- Published : 2005.03.01
Abstract
The effect of trimming process to adjust accurate resistance of a thin-film resistor was studied with respect to low temperature coefficient of resistance(TCR) and high precision. The characteristics of a thin-film resistor fabricated by sputtering were investigated depending on trimming condition and annealing temperature. Measured results showed that the characteristic of a thin-film resistor was degraded with increased trimming speed. However, an average resistance deviation and a TCR were improved to
저항 값을 맞추기 위한 트리밍 공정이 낮은 저항온도계수와 높은 정밀성을 요구하는 박막저항기 특성에 미치는 영향에 대한 연구가 수행되었다. 스퍼터링 방법으로 제조된 박막 저항기의 트리밍 속도에 따른 저항기의 특성 변화와 온도계수의 변화가 관찰되었다. 트리밍 속도의 증가에 따라서 박막 저항기 특성은 저하되었으며, 열처리로 저항 값의 평균 편차