JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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Simulation of Piezoelectric Dome-Shaped-Diaphragm Acoustic Transducers

  • Han, Cheol-Hyun (Packagin Technology Group, National Semiconductor) ;
  • Kim, Eun-Sok (Department of EE-Electrophysics, University of Southem California)
  • Published : 2005.03.31
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Abstract

This paper describes the simulation of a micromachined dome-shaped-diaphragm acoustic transducer built on a $1.5{\mu}m$ thick silicon nitride diaphragm ($2,000{\mu}m$ in radius, with a circular clamped boundary on a silicon substrate) with electrodes and piezoelectric ZnO film in a silicon substrate. Finite element analysis with ANSYS 5.6 has been performed to analyze the static and dynamic behaviors of the transducer under both pressure and voltage loadings.

Keywords

References

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