Journal of the Korea Academia-Industrial cooperation Society (한국산학기술학회논문지)
- Volume 6 Issue 1
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- Pages.78-82
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- 2005
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- 1975-4701(pISSN)
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- 2288-4688(eISSN)
A New Cleaning Concept for Display Manufacturing Process with Electrolyzed Anode Water
전해 양극수를 이용한 새로운 디스플레이 세정
Abstract
Display manufacturing process has adopted RCA cleaning, applying to larger area and coping with environmental issue for last ten years. However, the approaching concept of ozonized, hydrogenised, or electrolyzed water cleaning technologies is within RCA clean paradigm. In this work, only electrolyzed anode water was applied to clean particles and organics as well as metals based on Pourbaix concept, and as a test vehicle, MgO particles were introduced to prove the new concept. The electrolyzed anode water is very oxidative with high oxidation reduction potential (ORP) and low in pH of more than 900 mV and 3.1, respectively. MgO particles were immersed in the anode water and its weight losses due to dissolution were measured with time. Weight losses were in the ranges of 100 to 500 micrograms in 250 ml anode water depending on their ORP and pH. Therefore it was concluded that the cleaning radicals in the anode water was at least in the range of 1 to
디스플레이 세정의 개념은 기존의 반도체 세정인 RCA 세정을 근간으로 하고 있으며, 대면적화와 환경친화적인 관점으로 발전하여 왔다. 본 연구에서는 프베이 도표에 근거하여 전리수를 이용하여 입자를 제거할 수 있음을 예측하고 이를 확인하였다. 이 때 연구 대상으로 MgO 분말을 사용하였다. 사용된 전리수는 산화전위가 800 mV 이상이고 pH가 3.1으로 산화상이 강하였다 전리수에 용해되는 MgO 분말의 무게를 pH에 조사하였으며, 250 ml 전리수에 100-500 microgram 범위로 용해됨을 알 수 있었다. 이는
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