한국산학기술학회논문지 (Journal of the Korea Academia-Industrial cooperation Society)
- 제6권1호
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- Pages.24-28
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- 2005
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- 1975-4701(pISSN)
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- 2288-4688(eISSN)
마이크로머시닝 기술을 이용한 3차원 마이크로 챔버형 글루코스 센서의 개발
Development of Three-dimensional Chamber-type Glucose Sensor Using Micromachining Technology
초록
3차원 실리콘 챔버를 갖는
A micromachined biochip with a three dimensional silicon chamber was developed for the construction of biosensors. Anisotropic etching was used fur the formation of the chamber on the p-type silicon wafer(100) and then was glued to the Pyrex glass bottom-substrate with pre-deposited platinum electrode. The electrochemical characterization of its Pt electrode and Ag/AgCl reference electrode was investigated.