Laser Solutions (한국레이저가공학회지)
- Volume 8 Issue 1
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- Pages.39-44
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- 2005
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- 1229-0963(pISSN)
Periodic patterning using a femtosecond laser
펨토초 레이저를 이용한 미세 패터닝 기술
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Sohn Ik-Bu
(Information & Communications University) ;
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Lee Man-Seop
(Information & Communications University) ;
- Woo Jung-Sik (Phoco Co. Ltd.) ;
- Lee Sang-Man (Phoco Co. Ltd.) ;
- Chung Jeong-Yong (Phoco Co. Ltd.)
- Published : 2005.04.01
Abstract
We report experimental results on the periodic patterning using a Ti:sapphire femtosecond laser (800nm, 100fs, 1kHz). Periodic structures with reproducible basic patterns are produced both on the surface and inside transparent materials. Period patterning for the application to display panel is widely investigated. Also, the submicron dot and line patterns are fabricated inside fused silica glass, which is important for the formation of diffraction grating in integrated optical circuit. finally, we demonstrate the utility of the femtosecond laser application to optical memory by fabricating the three-dimensional dot patterns.