Microwave Properties of Tunable Phase Shifter Using High Temperature Superconducting Thin Film

고온초전도 박막을 이용한 튜너블 이상기의 마이크로파 특성

  • 곽민환 (한국전자통신연구원 기반기술연구소) ;
  • 김영태 (한국전자통신연구원 기반기술연구소) ;
  • 문승언 (한국전자통신연구원 기반기술연구소) ;
  • 류한철 (한국전자통신연구원 기반기술연구소) ;
  • 이수재 (한국전자통신연구원 기반기술연구소) ;
  • 강광용 (한국전자통신연구원 기반기술연구소)
  • Published : 2005.03.01

Abstract

High temperature superconductor, $\YBa_2Cu_3O_{7-x}$ (YBCO) and ferroelectric, $\Ba_{0.1}Sr_{0.9}TiO_{3}$ (BST) multilayer thin films were deposited using on MgO(100) substrates pulsed laser deposition. The thin films exhibited only (001) peaks of YBCO and 1357 The HTS thin films demonstrated excellent zero resistance temperature of 92.5 K. We designed and fabricated HTS ferroelectric phase shifter using high frequency system simulator and standard photolithography method, respectively The HTS phase shifter shows a low insertion loss (2.97 dB) and large phase change ($\162^{circ}$) with 40 V do bias at 10 GHz. The HTS phase shifter shows 54 of figure of merit. These results can be applicable to phased anay antenna system for satellite communication services.

Keywords