Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Possible application of single-walled carbon nanotube transistors for humidity sensor

단겹 탄소나노튜브 트랜지스터의 나노습도센서 응용가능성 연구

  • Na, Pil-Sun (Department of Material Engineering, Chungnam National University) ;
  • Kim, Hyo-Jin (Department of Material Engineering, Chungnam National University) ;
  • Lee, Young-Hwa (Department of Material Engineering, Chungnam National University) ;
  • Lee, Jeong-O (Advanced materials Div. Korea Research Institute of Chemical Technology) ;
  • Kim, Jin-Hee (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science)
  • 나필선 (충남대학교 재료공학과) ;
  • 김효진 (충남대학교 재료공학과) ;
  • 이영화 (충남대학교 재료공학과) ;
  • 이정오 (한국화학연구원 화학소재부 나노물성팀) ;
  • 김진희 (한국표준과학연구원 전자기표준부)
  • Published : 2005.09.30
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Abstract

The influence of water molecule on the electrical properties of single-walled carbon nanotube field effect transistors (SWNT-FETs) was reported. Conductance suppression was observed with the increase of the humidity. This can be explained by doping of the SWNT-FETs, which has p-type semiconductor characteristic, with the water molecules acting as an electron donor. However, after 65 % of humidity, conductance of the SWNT-FETs started to increase again, due to the opening of electron channels. Upon annealing at $400^{\circ}C$ in Ar atmosphere, conductance increases more than 500 %, and the threshold voltage shifts toward further positive gate voltages. The results of this experiment support possible application of single-walled carbon nanotubes for humidity sensing material.

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