대한방사선기술학회지:방사선기술과학 (Journal of radiological science and technology)
- 제27권2호
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- Pages.45-50
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- 2004
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- 2288-3509(pISSN)
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- 2384-1168(eISSN)
MWPECVD에 의한 박막의 합성과 방사선 검출 특성에 관한 연구
A study on Synthesis and Radiation Detector Fabrication of Thin Films by MW Plasma CVD
- Koo, Hyo-Geun (Dept. of Radiology, College Masan) ;
- Lee, Duck-Kyu (Dept. of Radiology, College Masan) ;
- Song, Jae-Heung (Dept. of Radiology, College Masan) ;
- Noh, Kyung-Suk (Dept. of Radiology, College Masan) ;
- Park, Sang-Hyun (Dept. of Electronic & Electrical Engineering, Kyungnam University)
- 발행 : 2004.06.30
초록
방사선검출기에 사용되는 다이아몬드는 그 비저항이
Synthesis diamond films have been deposited on the molybdenum substrates using an microwave plasma enhanced chemical vapor deposition method. The effects of deposition time, surface morphology, infrared transmittance and Raman scattering have been studied. Diamond deposited on molybdenum substrate for 100 hours by MW plasma CVD from