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Morphology of Carbon Nanotubes Prepared by Methane Plasma CVD

메탄 플라즈마 CVD법으로 합성한 탄소나노튜브의 구조적 특성

  • Kim, Myung-Chan (Department of Chemical Engineering, Myongji University) ;
  • Moon, Seung-Hwan (Department of Chemical Engineering, Myongji University) ;
  • Lim, Jae-Seok (Department of Chemical Engineering, Myongji University) ;
  • Hahm, Hyun-Sik (Department of Chemical Engineering, Myongji University) ;
  • Park, Hong-Soo (Department of Chemical Engineering, Myongji University) ;
  • Kim, Myung-Soo (Department of Chemical Engineering, Myongji University)
  • 김명찬 (명지대학교 공과대학 화학공학과) ;
  • 문승환 (명지대학교 공과대학 화학공학과) ;
  • 임재석 (명지대학교 공과대학 화학공학과) ;
  • 함현식 (명지대학교 공과대학 화학공학과) ;
  • 박홍수 (명지대학교 공과대학 화학공학과) ;
  • 김명수 (명지대학교 공과대학 화학공학과)
  • Published : 2004.12.31

Abstract

Multi-walled carbon nanotubes (CNTs) were prepared by microwave plasma chemical vapor deposition (MPCVD) using various combination of binary catalysts and methane precursor. The maximum yield (10.3 %) of CNTs was obtained using a methane-hydrogen-nitrogen mixture with volume ratio of 1:1:2 at 1000 W of microwave power. As the microwave power increased up to 1000 W, the deposition yield of CNTs raised from 4.1 % to 10. 3 %. However, the prepared CNTs at 800 W showed the more crystalline structure than those prepared at 1000 W. The prepared CNTs over different binary catalysts had various structural conformations such as aligned cylinder, bamboo, and nanofibers. The Id/Ig value of CNTs over$Fe-Fe/Al_2O_3, $Co-Co/Al_2O_3, and $Co-Cu/Al_2O_3 were in the range of 0.89${\sim}$0.93. Among the various binary catalysts used, $Fe-Co./Al_2O_3 showed the highest yield.

Keywords

References

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