열전대 센서와 압전체 구동기가 부착된 유량제어기의 DC 이득과 시상수를 이용한 제어에 대한 연구

A Study for Control using DC Gain and Time Constant of Flow Controller Operated by Piezoelectric Actuator and Thermocouple

This study was how to control the mass flow controller in gas supplying system. The flow controller consists of piezoelectric material and sensor with heating wire. It is difficult to obtain accurate model, because MFC was composed of many parts, and the relationship between input and output of controller is nonlinear. The model for control was obtained by time constant and DC gain Based on this model, PID controller was applied to flow controller using DSP board. Also, the results were compared to controller using system identification.