한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제41권11호
  • /
  • Pages.826-833
  • /
  • 2004
  • /
  • 1229-7801(pISSN)
  • /
  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
권호 표지
DOI QR코드

DOI QR Code

Boron 첨가량이 평면광회로용 실리카 박막의 UV 감광성에 미치는 영향

Effect of Boron Concentration on the UV Photosensitivity of Silica Glass Film for Planar Lightwave Circuit

  • 권기열 (한양대학교 세라믹공학과) ;
  • 조승현 (한양대학교 세라믹공학과) ;
  • 신동욱 (한양대학교 세라믹공학과) ;
  • 송국현 (산업자원부 기술표준원 디지털표준과) ;
  • 이낙규 (한국생산기술연구원 생산기술센터) ;
  • 나경환 (한국생산기술연구원 생산기술센터)
  • 발행 : 2004.11.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

본 연구에서는 PLC 소자용 브래그 격자에 적용되는 재료인 Ge, B 등이 다량 첨가되어 있는 실리카 유리에서 발생하는 감광성(photosensitivity)을 조사하고 감광성의 발현 기구를 연구하였다. 관찰된 굴절률 변화의 최대값은 약 $10^{-3}$ 정도였으며 열처리 과정을 거치기 전후에 이러한 굴절률의 변화 양상이 변화하는 것을 관찰하였다. 이와 같은 굴절률의 변화를 UV 흡수도와 라만 스펙트림을 이용하여 본 연구의 시편에서 발생하는 감광성의 기구를 규명한 결과 굴절률 변화 요인이 유리 내에 존재하는 내부응력과 첨가된 B에 의하여 증대된 고밀화 과정에서 발생하는 현상임을 밝혔다.

In this study, photosensitivity dynamics in SiO$_2$ glass with the composition similar to that of silica Planar Lightwave Circuit (PLC) devices was investigated as a fundamental study prior to the device fabrication. Silica bulk glasses with similar composition to the core layer of PLC devices were prepared with variable composition of B$_2$O$_3$. The photosensitivity in boron and germanium co-doped SiO$_2$ glass yields refractive index change $\Delta$n as high as 10$\^$-3/. However such index modulation disappeared after annealing. From the result of annealing experiment and W absorption / Raman spectra, we conclude the compaction model is applicable to our glass system.

키워드

참고문헌

  1. J. N. Damask and H. A. Hause, 'Wavelength Division Multiplexing Using Channel-Dropping Filters,' J. Lightwave Tech., 11 424-28 (1993) https://doi.org/10.1109/50.219575
  2. Y. Hibino and T. Kitagawa, 'Wavelength Division Multiplexer with Photoinduced Bragg Gratings Fabricated in a Planar-Lightwave-Circuit-type Asymmetric Mach-Zehnder Interferometer on Si,' IEEE Photonics Tech. Lett., 8 [I] 84-6 (1996) https://doi.org/10.1109/68.475786
  3. Y. Ohmori, 'Passive and Active Silica Waveguide on Si,' Proc. ECOC'93, MoPl (1993)
  4. A. Othonos, 'Review Article: Fiber Bragg Gratings,' Rev. Sci. Instrum, 68 [12] 4309-99 (1997) https://doi.org/10.1063/1.1148392
  5. C. Fiori and R. A. B. Devine, 'Evidence for a Wide Continuum of Polymorphs in a-Si$O_2$,' Phys. Rev. B, 33 1972-74 (1986)
  6. A. S. Jacqueline, S. Garcia-Blanco, B. Poumellec, and J. S. Aitchison, 'Dependence on Ge Doping of Specific Volume Change in Silica Induced by Electron-Beam Irradiation,' J. Non-Cryst. Solids, 322 284-88 (2003) https://doi.org/10.1016/S0022-3093(03)00216-3
  7. D. L. Williams, B. J. Ainslie, J. R. Armitage, R. Kashyap, and R. Campbell, 'Enhanced UV Photosensitivity in Boron Codoped Germanosilicate Fibres,' Elect. Lett., 29 [1] 46-7 (1993)
  8. J. W. Lee, Ph.D. Dissertation, Rutgers University (1999)
  9. E. M. Dianov, V. G. Plotnichenko, V. V. Kotasrev, and N. H. Ky, 'UV-Irradiation-Induced Structure Transformation of Germanosilicate Glass Fiber,' Opt. Lett., 22 [23] 1754-56 (1997) https://doi.org/10.1364/OL.22.001754
  10. P. J. Lemmaire, R. M. Atkins, V. Mizrahi, and W. A. Reed, 'High Pressure $H_2$ Loading as a Technique for Achieving Ultrahigh UV Photosensitivity and Thermal Sensitivity in Ge$O_2$ Doped Optical Fibres,' Elect. Lett., 29 [13] 1191-93 (1993) https://doi.org/10.1049/el:19930796
  11. I. Riant and F. Haller, 'Study of the Photosensitivity at 193 nm and Comparison with Photosensitivity at 240 nm; Influence of Fiber Tension: Type IIa Aging,' J. Lightwave Tech., 15 [8] 1464-69 (1997) https://doi.org/10.1109/50.618378
  12. M. G. Sceats, G. R. Atkins, and S. B. Poole, 'Photo-Induced Index Change in Optical Fibers,' Rev. Mat. Sci., 23 381-410 (1993) https://doi.org/10.1146/annurev.ms.23.080193.002121
  13. M. Douay, W. X. Xie, T. Taunay, P. Bernage, P. Niay, and P. Cordier, 'Densification Involved in the UV-Based Photosensitivity of Silica Glasses and Optical Fibers,' J. Lightwave Tech., 15 [8] 1329-42 (1997) https://doi.org/10.1109/50.618334