반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제3권4호
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- Pages.51-55
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- 2004
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- 1738-2270(pISSN)
차세대 반도체 FAB의 동적 구조 설계를 위한 PC형 격자보 구조물의 동적 특성 평가
A Dynamic Structural Design of PC type Sub-Structure for Next-Generation FAB based on Dynamic Test and Simulation
초록
In the design stage of high precision manufacturing/inspection FAB facilities, it is necessary to investigate the allowable vibration limits of high precision equipments and to study structural dynamic characteristics of C/R and Sub-structure in order to provide structural vibration criteria to satisfy these allowable limits. The goal of this study is to investigate the dynamic characteristics of PC-Type mock-up structures designed for next generation TFT-LCD FAB through experiments and analysis procedures. Therefore, in order to provide a proper dynamic structural design for high precision manufacturing/inspection work process, these allowable limits must be satisfied.