반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제3권2호
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- Pages.41-46
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- 2004
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- 1738-2270(pISSN)
Error Compensation of Laser Interferometer for Measuring Displacement Using the Kalman Filter
- Park, Tong-Jin (Prec. Mechanical Engineering, Hanyang University) ;
- Lee, Yong-Woo (LG Production Engineering Research Center) ;
- Wang, Young-Yong (Korean Railroad) ;
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Han, Chang-Soo
(Mechanical Engineering, Hanyang University) ;
- Lee, Nak-Ku (KITECH) ;
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Lee, Hyung-Wok
(KITECH) ;
- Choi, Tae-Hoon (KITECH) ;
- Na, Kyung-Whan (KITECH)
- 발행 : 2004.06.01
초록
This paper proposes a robust discrete time Kalman filter (RDKF) for the dynamic compensation of nonlinearity in a homodyne laser interferometer for high-precision displacement measurement and in real-time. The interferometer system is modeled to reduce the calculation of the estimator. A regulator is applied to improve the robustness of the system. An estimator based on dynamic modeling and a zero regulator of the system was designed by the authors of this study. For real measurement, the experimental results show that the proposed interferometer system can be applied to high precision displacement measurement in real-time.