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Micro-scale Vibration Phenomena in a Linear Motion Guide Having Rolling Elements

구름 요소를 사용하는 LM 가이드에서의 마이크로스케일 진동현상#

  • 이용섭 (서울대학교 대학원 기계항공공학부) ;
  • 최재석 (연세대학교 대학원 기계공학부) ;
  • 유정훈 (연세대학교 기계공학부) ;
  • 이동진 (삼성전자 메카트로닉스센터) ;
  • 이석원 (삼성전자 메카트로닉스센터) ;
  • 김윤영 (서울대학교 기계항공공학부)
  • Published : 2004.10.01

Abstract

Linear motion ( LM) guides having rolling elements have been used to position precision machines accurately. For ultra-accurate Positioning control of Precision machines, the understanding of the dynamic behavior of the LM guide at the macro and/or micro scales is most critical, but the research on this subject is rare. The objective of the present research is to investigate the vibration phenomena of the LM guide where balls are used as the rolling elements. Several experiments show the nonlinear characteristics of the LM guide such as hysteresis behavior and force-dependent natural frequencies phenomena.

Keywords

References

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