Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Effect of Heat-treatment Conditions on Orientation, Structures and Resistances of LaNiO3 Thin Films by Sol-gel process

열처리조건이 LaNiO3 졸-겔 박막의 배향성과 구조 및 저항성에 미치는 영향

  • Published : 2004.08.01
Download PDF
⟨ Previous Next ⟩

Abstract

LaNiO$_3$(LNO) thin films on (100) Si substrates are prepared by sol-gel method on heat treatment conditions, such as heat transfer direction, pyrolysis and annealing process, and annealing temperatures and times. The effect of heat treatment conditions on the (100) orientations, structures and resistances of the thin films are investigated by XRD, SEM(FESEM), and a lout probe method. Highly (100) orientation factor(0.97), a pseudocubic crystalline structure with a dense and uniform microstructure could be formed by the following conditions： 1) the heat transfer direction is from Si substrate to LNO, 2) the pyrolysis and annealing process are alternated, 3) the annealing temperature is $650^{\circ}C$ and 4) the annealing times is 3 minutes. The sheet resistance of thin films decreased with increasing of a annealing temperature and time, and a number of coating.

Keywords

References

  1. 전자재료학회논문지 v.16 no.8 La203-NiO의 메카노케미컬 합성에 의한 LaNiO3결정상 생성 김대영;김강언;이명교;정수태
  2. J. of Mater. Sci. v.35 Effect of thermal annealing on transparent conductive LaNiO3 thin film prepared by an aqueous method T. Liu;N. Xu;X. G. Zheng;T. Watanabe;O. Agye man;M. Akiyama https://doi.org/10.1023/A:1004758726714
  3. Thin Solid Films v.375 Conductiong lanthanum nickel oxide as electrodes for lead zirconate titanate films Y. Zhang;Q. F. Zhou;H. L. W. Chan;C. L. Choy https://doi.org/10.1016/S0040-6090(00)01267-0
  4. J. Crystal Growth v.220 Growth of (100)-oriented LaTiO3 thin films directly on Si substrates by a simple metalorganic de-composition technique for the highly oriented PZT thin films X. J. Meng;J .G. Cheng;J. L. Sun;H. J. Ye;S. L. Guo;J. H. Chu https://doi.org/10.1016/S0022-0248(00)00742-9
  5. Sur-face and coatings technology v.137 Formation of highly oriented and polycrystalline lathanum nickelate films by a spin coating pyrolysis process Kyu-Seog Hwang;Seon-Suk Min;Yeong-Joon Park
  6. Mater. Lett. v.26 Epitaxial growth of conductive LaNiO3 thin films by pulsed laser ablation T. Yu;Y. F. Chen;Z. G. Lin;X. Y. Chen;L. Sun;N. B. Ming;L. J. Shi https://doi.org/10.1016/0167-577X(95)00199-9
  7. Thin Solid Films v.410 Comparative analysis for the crystalline and ferroelectric properties of Pb(Zr, Ti)O3 thin films deporited on metallic LaNiO3 and Pt electrodes B. G. Chae;Y. S. Yang;S. H. Lee;M. S. Jang;S. J. Lee;S. H. Kim;W. S. Baek;S. C. Kwon https://doi.org/10.1016/S0040-6090(02)00254-7
  8. Applied Surface Science v.171 Preparation of highly (100)-oriented matallic LaNiO3 films on Si substrates by a modified metalorganic decomposition technique X. J. Meng;J. L. Sun;J.Yu;H. J. Ye;S. L. Guo;J. H. Chu https://doi.org/10.1016/S0169-4332(00)00537-7
  9. Appl. Phys. Lett. v.68 no.10 Preparation of perovskite conductive LaNiO3 films by metalorganic decomposition Aidong Li;Chuanzhen Ge;Peng Lu;Naiben Ming
  10. Journal of the European Ceramic Society v.21 Characteristics of oriented LaNiO3 thin films fabricated by the sol-gel methode Shinichi Miyake;Shinobu Fujihara;Toshio Kimura https://doi.org/10.1016/S0955-2219(01)00056-5
  11. Physical review B v.49 no.21 Domain formation and strain relaxation in epitaxial ferroelectric heterostructures B. S. Kwak;A. Erbil;J. D. Budai;M. F. Chisholm;L. A, Boatner;B. J. Wilkens https://doi.org/10.1103/PhysRevB.49.14865
  12. 전기전자재료학회논문지 v.15 no.3 분쇄방식에 다른 LaAlO3 세라믹의 합성과 유전특성 조정호;최상수;김강언;정수태;조상희
  13. Acta Metallurgica v.1 no.1 X-ray line broadening from filed aluminium and wolfram G. K. Williamson;W. H. Hall https://doi.org/10.1016/0001-6160(53)90006-6
  14. Introduction to Ceramics (2th) W. D. Kingery;H. K. Bowen;D. R. Uhlmann
  15. Thin Film Phenmena Kasturi L. Chopra