Fabrication of 3D Feed Horn IR Antenna for IR Detector

  • Kim, Kun-Tae (Microsystem Research Center, Korea Institute of Science and Technology) ;
  • Han, Yong-Hee (Microsystem Research Center, Korea Institute of Science and Technolog) ;
  • Shin, Hyun-Joon (Microsystem Research Center, Korea Institute of Science and Technolog) ;
  • Sung Moon (Microsystem Research Center, Korea Institute of Science and Technolog) ;
  • Park, Jung-Ho (Dept. of Electronics Engineering, Korea University)
  • Published : 2004.08.01

Abstract

A three dimensional feed horn 10${\mu}{\textrm}{m}$ wavelength infrared antenna has been suggested, fabricated and characterized. It was applied to an infrared detector for efficient collecting of IR radiation and for reducing background noise. The horn antenna size was designed for maximum antenna directivity. The 3D feed horn antenna mold was fabricated using rotating and tilted illumination while the antenna plate was constructed by way of electroplating. Antenna characteristics were measured by coupling with a microbolometer. Measurement results indicated that the directivity of the antenna is 16.1㏈ and the background noise is reduced by approximately two times.

Keywords

References

  1. A. Luukanena, 'A superconducting antenna-coupled hot-spot microbolometer', Applied Physics Letters, vol.82, pp.3970-3972, June. 2003
  2. Leonid S. Kuzmin, 'On the concept of a hot-electron microbolometer with capacitive coupling to the antenna', Physica B: Condensed Matter, vol. 284-288, pp.2129-2130, July. 2000
  3. N. Chong, 'Antenna-coupled polycrystalline silicon air-bridge thermal detector for mid-infrared radiation', Appl. Phys. Lett., vol. 71, No. 12, pp.1607-1609, September. 1997
  4. Javier AIda, 'Responsivity of infrared antennacoupled microbolometers for air-side and substrate- side illumination', Infrared Physics and Technology, vol.41, pp.I-9, February. 2000
  5. Jong-Yeon Park, 'Fabrication of a High-Aspect-Ratio Structure(HARS) and a 3D feed-Horn-Shaped Structure for a 3D MEMS Antenna Array by using a Novel UV Lithography Apparatus', J. Korean Physical Society, vol.41, pp.552-556, October. 2002
  6. Kuntae Kim, 'Fabrications of microbolometer coupled with 3D-feed hom antenna', Eurosensors16, Prague, September 2002, pp.218-221
  7. Constantine A. Balanis, Antenna Theory: analysis and design, John Wiley and Sons,Inc. ,1997, pp.695696
  8. Constantine A. Balanis, Antenna Theory: analysis and design, John Wiley and Sons,Inc. ,1997, pp.39-53
  9. Young-Soo Kwon, 'THe Novel Silicon MEMS Package for MMICS', KIEE Paper Journal, vol 51, pp.271-277, 2002
  10. Jin-Ho Kim, 'Fabrication and Characteristics of Thermopneumatic-Actuated Polydimethylsiloxane Micropump', KIEE Paper Journal, vol 53, pp.342346, 2004
  11. Jin-Ho Kim, 'Piezoelectric-Actuated Polydimethylsiloxane(PDMS) Micropump with Diffusers', KIEE Paper Journal, vol 53, pp.487-49I, 2003