3가 크롬 박막 내의 극미세 결함 측정을 위한 중성자 소각 산란법의 적용

Application of Small Angle Neutron Scattering to Determine Nano-size Cracks in Trivlent Chromium Layers

  • 최용 (선문대학교 신소재생명화학공학부)
  • Choi, Yong (Division of Advanced Materials and Bio-Chemical Engineering, Sunmoon University)
  • 발행 : 2004.06.01

초록

The size and number of nano-size defects of thin trivalent chrome layers were determined by small angle neutron scattering (SANS) without breaking the thin chrome layers. Most of defect size of the trivalent chromium prepared in this test conditions is in the range of about 40nm. The number of nano-size defects less than about 40nm of the trivalent chromium layer increases with plating voltage at constant current density From this study, SANS is proved as one of useful techniques to evaluate nano-size defects of thin film layer.

키워드

참고문헌

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