Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Microstructures of HAp and HAp-Ag Composite Coating Layer Prepared by RS Magnetron Sputtering

RE Magnetron Sputtering에 의해 제조된 HAp와 HAp-Ag복합코팅층의 미세조직

  • Lee, Hee-Jung (School of Advanced Materials Engineering, Kongju National University) ;
  • Oh, Ik-Hyun (School of Advanced Materials Engineering, Kongju National University) ;
  • Park, Sang-Shik (Department of Advanced Materials Engineering, Sangju National University) ;
  • Lee, Byong-Taek (School of Advanced Materials Engineering, Kongju National University)
  • Published : 2004.04.01
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Abstract

Hydroxyapatite (HAp) and HAp-Ag composite layers were coated on ZrO$_2$and Si wafer substrates by RF magnetron sputtering technique. The thickness of coating layers was in the range of 0.7∼1.0$\mu\textrm{m}$ and its roughness was 3∼4nm. The heat treated HAp coating layers were composed with nano-sized crystallines. However, the HAp-Ag composite layers showed the mixed structure with crystalline and amorphous phases. The Ca/P ratio of the as-received HAp coating layer was 1.9, but, the value was decreased as the Ag content with increased. Also, the Vickers hardness of HAp coating layer decreased as the Ag content increase.

RF magnetron sputtering법에 의해 단상의 하이드록시아파타이트와 하이드록시아파타이트은 복합코팅층을 ZrO$_2$와 Si 웨이퍼 기판에 코팅하였다. 이들 코팅층들의 두께 0.7∼1.0$\mu\textrm{m}$ 범위였으며 또한 거칠기(roughness)는 3∼4nm였다. 열처리된 HAp 코팅층은 나노크기의 결정들로 구성되어 있었으며, 반면 Ag가 함유된 복합코팅층의 경우 결정질과 비결정질이 혼재되어 있었다. 열처리 전 HAp 코팅층의 Ca/P비는 1.9였고, Ag의 함량이 증가함에 따라 비는 감소하는 경향을 나타내었다. 또한 Ag 함량이 증가함에 따라 HAp코팅층의 미소 경도는 감소하였다.

Keywords

References

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