The Journal of Korean Institute of Electromagnetic Engineering and Science (한국전자파학회논문지)

The Korean Institute of Electromagnetic Engineering and Science (한국전자파학회)
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A New Modeling Methodology of TFBAR

박막공진기에 대한 새로운 모델링 기법

  • 김종수 (연세대학교 전기전자공학과) ;
  • 구명권 ((주)엠에스 솔루션) ;
  • 육종관 (연세대학교 전기전자공학과)
  • Published : 2004.01.01
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Abstract

In this paper, a new modeling methodology of thin film bulk acoustic resonator(TFBAR) is presented and the formulations of each lumped element in the model are also introduced. The new model is based upon the Mason model that is a reasonable model to explain the physical characteristics of unit TFBAR. After simplifying the modified Mason model with an additional dielectric loss term, the new model similar to Modified Butterworth-Van Dyke(MBVD) model is complete. The proposed model has three optimization variables which is half of the MBVD model. As a result, the curve fittings for the measured data are much faster and more accurate than any other conventional models. Moreover, it is very useful to design the bandpass filters or voltage controlled oscillators due to the design parameters, such as resonant and anti-resonant frequency, which can reflect the intentions of designer in the model.

본 논문에서는 박막공진기에 대한 새로운 모델링 기법을 제안하고, 등가회로를 이루고 있는 각 수동소자들 값에 대한 정확한 공식을 소개하였다. 제안된 새로운 모델은 박막공진기의 물리적 수직 구조 특성을 잘 표현하고 있는 Mason모델에 대해 유전체 손실을 표현할 수 있는 저항 성분을 추가한 뒤, 임피던스 특성을 기반으로 한 단순화 과정을 통해 유도되었다. 제안된 모델은 기존의 Modified Butterworth-Van Dyke(MBVD) 모델과 비슷한 형태로 표현되지만 최적화 변수가 3개에 불과하기 때문에 측정값에 대한 훨씬 정확하고 빠른 커브 피팅(curve fitting)을 수행 할 수 있으며, 공진주파수나 반공진주파수와 같은 설계자의 의도를 반영 할 수 있는 변수들로 구성되기 때문에 여파기나 전압제어 발진기 등을 설계하는데 있어서 편리하게 이용될 수 있다.

Keywords

References

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