한국진공학회지 (Journal of the Korean Vacuum Society)

한국진공학회 (The Korean Vacuum Society)
권호 표지

Chemical and Electrical Properties of Polyimide Thin Flim Fabricated by Ionized Cluster Beam

  • 발행 : 2004.03.01
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초록

키워드

참고문헌

  1. J. Polym. Sci. Macromol. Rev. v.11 C.E.Sroog
  2. Polyimides-Synthesis, Characterization and Applications A.M.Wilson;K.L.Mittal(ed.)
  3. IEEE Trans. Components Hybrids Manuf. Technol. v.7 R.J.Jensen;J.P.Cummings;H.Vora
  4. J. Vac. Sci. Technol. v.A5 Y.Takahashi;M.Iijima;K.Inagawa;A.Itoh