Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)
- Volume 11 Issue 3 Serial No. 32
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- Pages.91-97
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- 2004
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- 1226-9360(pISSN)
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- 2287-7525(eISSN)
Improvement of Electrical Property in Ferroelectric Thin Films for ULSI's Capacitor
초고집적반도체의 커패시터용 강유전 박막의 전기적 특성 개선
- Mah Jae-Pyung (Department of Electronic Engineering, Honam University) ;
- Park Sam-Gyu (Department of Electronic Engineering, Honam University)
- Published : 2004.09.01
Abstract
PBT thin films were formed by rf-magnetron sputtering on
PZT 박막을 rf-마그네트론 스퍼터링으로