Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Effects of Substrate Temperature on Structural and Electrical Properties of α-Fe2O3 Films Prepared by Ultrasonic Spray Pyrolysis

초음파분무법으로 제조한 α-Fe2O3 막의 구조적 및 전기적 특성에 미치는 기판온도 효과

  • Ma, Tae-Young (Department of Electrical & Electronic Engineering and RICIC, Gyeongsan National University) ;
  • Kim, Jeong-Gyoo (Department of Electrical & Electronic Engineering and RICIC, Gyeongsan National University)
  • 마대영 (경상대학교 전기전자공학부 및 RICIC) ;
  • 김정규 (경상대학교 전기전자공학부 및 RICIC)
  • Published : 2004.07.31
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Abstract

${\alpha}-Fe_{2}O_{3}$ films were prepared by ultrasonic spray pyrolysis (USP) on $SiO_{2}$ coated Si wafers using iron acetylacetonate as an iron precursor. The crystallographic properties and surface morphologies of the films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. X-ray photoelectron spectroscopy (XPS) was carried out to determine the Fe oxidation states. In order to observe stability of the films to temperature, the resistance variation of the films with an ambient temperature was measured. The effects of substrate temperature on the structural and electrical properties of the ${\alpha}-Fe_{2}O_{3}$ films were studied. The films were densified from the substrate temperature of $350^{\circ}C$. The grain size of the films grown at $400^{\circ}C$ was shown to be increased abruptly comparing with that of $350^{\circ}C$. The films showed a low resistance variation between the ambient temperature of $300^{\circ}C$ and $350^{\circ}C$.

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References

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