Effects of Heterostructure Electrodes on the Reliability of Ferroelectric PZT Thin Film

강유전체 PZT박막의 신뢰도에 미치는 헤테로구조 전극의 영향에 대한 연구

  • 이병수 (인하대 차세대고전압전력기술연구센터) ;
  • 이복희 (인하대 차세대고전압전력기술연구센터) ;
  • 이덕출 (인하대 차세대고전압전력기술연구센터)
  • Received : 2002.11.07
  • Accepted : 2003.02.21
  • Published : 2003.03.01

Abstract

The effect of the Pt electrode and the $Pt-IrO_2$ hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a $Pt-IrO_2$ hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized $Pt-IrO_2$ hybrid electrode significantly enhanced the fatigue properties of the PZT thin film with minimal leakage current.

Keywords