전기학회논문지P (The Transactions of the Korean Institute of Electrical Engineers P)

  • 제52권1호
  • /
  • Pages.14-19
  • /
  • 2003
  • /
  • 1229-800X(pISSN)
  • /
  • 2586-7792(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

강유전체 PZT박막의 신뢰도에 미치는 헤테로구조 전극의 영향에 대한 연구

Effects of Heterostructure Electrodes on the Reliability of Ferroelectric PZT Thin Film

  • 이병수 (인하대 차세대고전압전력기술연구센터) ;
  • 이복희 (인하대 차세대고전압전력기술연구센터) ;
  • 이덕출 (인하대 차세대고전압전력기술연구센터)
  • 투고 : 2002.11.07
  • 심사 : 2003.02.21
  • 발행 : 2003.03.01
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초록

The effect of the Pt electrode and the $Pt-IrO_2$ hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a $Pt-IrO_2$ hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized $Pt-IrO_2$ hybrid electrode significantly enhanced the fatigue properties of the PZT thin film with minimal leakage current.

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