반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제2권4호
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- Pages.31-35
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- 2003
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- 1738-2270(pISSN)
열교환 부품용 발열체 형성기술
The Formation Technique of Thin Film Heaters for Heat Transfer Components
초록
We present a formation technique of thin film heater for heat transfer components. Thin film structures of Cr-Si have been prepared on top of alumina substrates by magnetron sputtering. More samples of Mo thin films were prepared on silicon oxide and silicon nitride substrates by electron beam evaporation technology. The electrical properties of the thin film structures were measured up to the temperature of
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